Size Effects on the Mechanical Properties of Materials for MEMS

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概要

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• In this paper, size effects on the mechanical properties of micro materials will be reviewed. Properties that will be addressed include yield strength, fatigue and creep behavior and fracture toughness of thin metallic films as studied by several specialized testing techniques including : (i) micro-tensile testing for yield strength and low cycle fatigue, (ii) nanoindentation and microbeam deflection for high cycle fatigue, and (iii) thermal cycling experiments for creep and fracture toughness. Cu thin films were investigated in all studies, only the fracture toughness experiments were carried out on NiAl thin films

• 一般社団法人日本機械学会の論文
• 2002-10-10

著者

• Kraft Oliver

  Institut Fur Materialforschung Ii Forschungszentrum Karlsruhe In Der Helmholtzgemeinschaft

関連論文

• OS6(5)-19(OS06W0407) Mechanical Testing of Materials in Small Volumes by Nanoindentation and Microbeam Bending
• Size Effects on the Mechanical Properties of Materials for MEMS

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