OS6(2)-7(OS06W0411) Micromechanical Testing of SU-8 Cantilevers
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概要
- 論文の詳細を見る
- 一般社団法人日本機械学会の論文
- 2003-09-09
著者
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Moore David
Dept. Of Engineering Cambridge Univ.
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Higo Yakichi
Tokyo Inst. Of Tech.
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Hopcroft Matthew
Dept. of Engineering, Cambridge Univ.
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Kramer Tobias
Microsystems Laboratory, Ecole Polytechnique Federale de Lausanne (EPFL)
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Kim Gyuman
Microsystems Laboratory, Ecole Polytechnique Federale de Lausanne (EPFL)
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Takashima Kazuki
Tokyo Inst. of Tech.
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Brugger Juergen
Microsystems Laboratory, Ecole Polytechnique Federale de Lausanne (EPFL)
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Brugger Juergen
Microsystems Laboratory Ecole Polytechnique Federale De Lausanne (epfl)
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Kim Gyuman
Microsystems Laboratory Ecole Polytechnique Federale De Lausanne (epfl)
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Kramer Tobias
Microsystems Laboratory Ecole Polytechnique Federale De Lausanne (epfl)
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Hopcroft Matthew
Dept. Of Engineering Cambridge Univ.