気体式角速度センサにおける流体挙動解析
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概要
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It is impossible to disregard the adverse effect of acceleration on the gas angular rate sensor that detects channel decentering at respective angular rates by means of spraying gas to a pair of heating resistance wires, because such a sensor has characteristics of a large buoyancy caused by temperature distribution. It is an essential condition to set requirements for acceleration compensation, because such sensor, especially compact one, has a characteristic that respective heating resistance-wires are subject to interact each other. In this paper, fluid behaviors for such gas angular-rate sensor are briefly described with respects to both forced convection and natural convection to suggest requirements for gas volume obtaining an angular-rate output without the adverse affect of acceleration. Micromachining sensors with semiconductor process were used as samples under test. This paper also defines the requirements described above, and indicates increasing possibilities to provide accurate, low-cost angular-rate sensors without adverse effect of buoyancy.
- 一般社団法人日本機械学会の論文
- 2001-09-25
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