送りねじの予圧変化による微小送り : 超精密位置決めへの応用

概要

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In the preloaded double nuts of lead screw, the nuts displace slightly in the axial direction with the preload change because of the deformations of threads and screw, nut body. To apply this small displacement to the fine feed in ultraprecision positioning, the nut displacement characteristics accompanying preload change are examined against ball and sliding screws. Theoretical displacement is the order of nanometer with preload change of 1N and less displacement is easy to obtain under low spacing part stiffness. The experimental results obtained by the feed units show the step feed of from nanometer to submicron and the range of fine feed comes to several microns. The feed drive equipped with preload control lead screw has the advantage of high resolution positioning over a long traverse path by using it in combination with coarse positioning of screw rotation and fine positioning of preload control.
社団法人日本機械学会の論文
1998-05-25