積分型位相シフト法を用いた実時間ナノメートル変位分布計測(<小特集>実験計測技術の新展開)

概要

論文の詳細を見る
Phase-shifting methods are advantageous to analyze phases of fringe patterns obtained by interferometry. Conventional phase-shifting methods usually uses three or four images obtained by phase-shifting. If only one camera is used for the three or four images, the fringe images are recorded with stopping phase-shifting so that the brightness does not change during the exposure time of the camera. The stopping procedure obstructs speeding up of the measurement system. We proposed a new method to take four images for phase analysis without stopping phase-shifting. The method is called the integrated phase-shifting method (IPSM). This method is suitable for real-time phase analysis. In this method, four images are recorded continuously with full-exposure time during phase-shifting. In this paper, a development of a real-time phase analysis circuit using this theory and an application to nanometer-order displacement distribution measurement for a micro-accelerometer manufactured by micro-machine techniques are shown.
一般社団法人日本機械学会の論文
2001-03-25