The Axial Flow Molecular Pump : 3rd Report, Trial Manufacture and Performance Test

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概要

• 論文の詳細を見る

• The operating mechanism of an axial flow molecular pump has already been reported in the first and second reports of this study. On the basis of the results of these reports, a method for determining the blade row arrangement is proposed. Then, an axial flow molecular pump is designed and manufactured for trial. Lastly, the performance of the manufactured pump is tested by experiments. The ultimate pressure of 5.2×10^<-9> mmHg and the pumping speed of 670 l/sec for room temperature nitrogen are obtained. These measured values agrees with the predicted values.

• 一般社団法人日本機械学会の論文

著者

• Sawada Tadashi

  The Institute Of Physical And Chemical Research

• TANIGUCHI Osamu

  The Institute of Physical and Chemical Research

関連論文

• The Axial Flow Molecular Pump : 4th Reprot, Performance of a Rotor with a Single Blade Row in the Transition Flow Regime
• The Axial Flow Molecular Pump : 3rd Report, Trial Manufacture and Performance Test
• Studies on Vibratory Feeder(2nd Report)

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