The Applications of Ultrasonic Waves to Mechanical Measurement : 1st Report, The Measurement of Displacement Using a 40kHz Ultrasonic Wave

概要

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This paper shows the methods and accuracy of a displacement measuring method which uses two 40kHz ultrasonic wave sensors as a transmitter and a receiver. The distance from the measuring probe to an object is measured by a phase difference which occurs between transmitted ultrasonic waves and received ones. This method has a special merit of performing the most accurate measurement with the simplest device. Accuracy of better than 1 um is obtained. At the end of this study, this separated probe method is applied to measure the displacement of a grinding head, and is compared with the electric micrometer. Experimental results show that this new method is almost as practical as conventional measuring methods, like the electric micrometer.
一般社団法人日本機械学会の論文