B22-036 AN ARTIFICIAL GEL STRUCTURE FABRICATED BY SILICON MICROMACHINING

概要

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We have successfully fabricated an artificial gel for sieving DNA with length by silicon micromachining. The artificial gel has a potential to optimize device design for DNA sizing analysis. A novel fabrication technique for pillar structures with sub-micron spaces has been established, that requires only conventional lithography and electrochemical etching of silicon. Less that 100nm spaces have been achieved. For evaluation, DNA molecules were injected into pillar structure by applying DC voltage. We used 700bp (base pair), 5000bp and 48500bp DNA for observation by a fluorescent microscope. Compared 700bp with 5000bp, the difference of motion speed is clear in pillar structures with 400nm, whereas difference is less clear between 5000bp and 48500bp. Main cause of separation is the duration time for DNA to deform the shape when DNA molecule gets into narrow spaces. Deformation of the DNA molecule during passing through 300nm spaces is verified by fluorescent imaging.
一般社団法人日本機械学会の論文
2003-11-30