BaTiO_3真空蒸着膜の結晶生成に及ぼす真空度と蒸着速度の影響

概要

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It is the purpose of this experiment to study how the growth of evaporated BaTiO_3 deposit in vacuum into crystal films varies dependening on the difference between the degree of vacuum and the deposition rate. The degrees of vacuum applied were from 2×10<-3> to 2×10<-6> Torr. A tungsten boat filament was used for evaporation heater. The deposition rates were varied from 1 to 30 Å/s by changing the current intensity applied to the filament. The thickness of the films was 1μm to 2.5μm. The substrate used was a platinum plate and its temperature was kept at 500℃ constant. As the result the condition of the films is found as follows as they have been examined by X-ray diffractions : In the cases of 10<-3> and 10<-4> Torr only the diffraction lines of the platinum plates are observed, but almost no trace is observed of crystal of BaTiO_3, regardless of deposition rates, while in the cases of 10<-5> and 10<-6> Torr, when the deposition rates are relatively smaller strong diffraction lines of BaTiO_3 are seen. However the electron micrographs show that as the deposition rate increases the corresponding sizes of the crystals become larger until the rate reaches 10 Å/s. At this peak, the size begins gradually to be smaller as the rate increases. These crystals are all of cubic system. Impurities of BaWO_4 are present in all the samples irrespective of the degree of vacuum and the diposition rate.
社団法人日本材料学会の論文
1971-04-15