多相酸化バナジウム薄膜の合成と金属-絶縁体転移挙動

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概要

• 論文の詳細を見る

• The metal-to-insulator (MIT) characteristics of the multiphase vanadium oxide films including V^<2+>V^<3+>V^<4+> and V^<5+> ions prepared by reactive magnetron sputtering were studied. The average valency of vanadium ion increased when the residence time of active vanadium atom near the oxygen injection pipe, because the oxygen potential of this region is much higher than other part of chamber. Therefore, the final phases of the films depend on the configuration of sputtering system. For two phase films, resistivity changed by a factor of 〜 10^3Ω・cm. However, MIT characteristics is getting weaker for the films consisting of more than two phases. Therefore, the strain sensitive phase transition is suggested as a mechanism of MIT of multiphase vanadium oxide thin films.

• 社団法人日本セラミックス協会の論文
• 1995-03-01

著者

• Ko Kyung

  Department Of Materials Science And Engineering Ajou University

• Ahn Jae

  Department Of Materials Science And Engineering Ajou University

• CHI Ung-Up

  Dong Yang Institute of Polytechnic

• Chi U‐u

  Dong Yang Institute Of Polytechnic

• Ahn Jae

  Department Of Advanced Materials Science And Engineering Daejin University

• Ahn Jae

  Department Of Advanced Materials Science & Engineering Daejin University

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