ゾル・ゲル法により石英ガラス基板上に作製したTiO_2膜の窒化
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概要
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Non-stoichiometric titanium nitride coating film was prepared on the SiO_2 glass substrate by ammonolysis of titanium dioxide coating film applied by sol-gel method. The TiO_2 sol suitable for dip-coating was obtained by using diethanolamine as a stabilizing agent, when water and solvent were mixed in the molar ratio of 3 : 5. The TiO_2 coating film thus obtained was converted to titanium nitride by heating at 1100℃ under the flow of NH_3 gas. The obtained titanium nitride film was fairly sensitive to air at temperatures above 400℃ and gradually transformed to TiO_2.
- 社団法人日本セラミックス協会の論文
- 1990-11-01