RuO_2を接合層に用いたAl_2O_3基板上のAu薄膜の熱安定性

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概要

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• The effect of RuO_2 thin films on stabilizing the thermal properties of Au thin films deposited on Al_2O_3 substrates was investigated. Dependencies on temperature of both sheet resistance and adhesion strength were measured. The adhesion strength of the Au/RuO_2 system was constant with temperature. while that of the Au/Pt/Ti system decreased as increasing temperature beyond 400℃. The adhesive properties of the Au/RuO_2 system were not influenced by heating and stable up to 800℃. The sheet resistance of the Au/RuO_2 system remained constant up to 700℃. The RuO_2 thin films can operate as heat-resisting adhesion layers in Au thin films. Au thin films were highly oriented in the Au(111) plane.

• 2001-06-01

著者

• 松井 光彦

  (株)トクヤマつくば研究所

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• RuO_2を接合層に用いたAl_2O_3基板上のAu薄膜の熱安定性

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