Analyses of Spatially Resolved Electron Energy Distribution and Transport Properties in Steady State in CF_4

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概要

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• Under homogeneous electrostatic field in gas between two plane electrodes, the electron energydistribution and transport properties near the electrodes are usually position dependent. Boltz-rnann eqtzation analyses for such position dependent energy distribution and transport propertiesin steady state are very few dtre to its diffictrlty, In this paper, position dependent electron behav-iors in CF4 calctnlated using the Steady State Townsend flight time integral method (SST-FTI)for several boundary conditions are presented with the theory of the SST-FTI.

• 社団法人日本物理学会の論文
• 1997-06-15

著者

• Ikuta Nobuaki

  Research Institute Chiba Institute Of Technology

• TAKEDA Akihide

  Department of Science for Living,Shikoku University

• Takeda A

  Shikoku University

• Takeda Akihide

  Department Of Science And Living Shikoku University

• Takeda Akihide

  Department Of Science For Living Shikoku University

関連論文

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• Irreversible Relaxation of Velocity Distribution of Gas Particles through Collisions
• Comparison of Electron Diffusion Coefficients Defined in Velocity and Position Spaces D_V and D_T in CF_4
• Effective Secondary Electron Yield of a Cathode for Plasma Display Panel

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