Breakdown of Radiofrequency Discharge in a Superimposed D.C. Field

概要

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Breakdown voltages have been measured in case of air, hydrogen, oxygen and carbon dioxide at a pressure of a few millimeters of mercury when excited simultaneously by a radiofrequency field (frequency 10.3Mc/sec) and a variable d.c. field which varies from 0 to 240volt/cm. It is found that the breakdown voltage increases when the d,c, field is small, and when the field is further increased it shows a maximum and then gradually falls for all the gases studied, the maximum occuring at a d.c. voltage which is different for different gases. It has been shown that, when the d.c. field is small, the dominant factor is the loss of electrons by diffusion as well as by mobility, which causes the breakdown voltage to increase, but when the d.c. field is increased, contribution due to d.c. ionization has also to be taken into consideration. This d.c. ionization causes a decrease in the radiofrequency voltage necessary for breakdown. A mathematical expression has been deduced which explains satisfactorily the observed experimental results. In the expression deduced the effect of secondary ionization as well as that of electron attachment have been taken into consideration.
社団法人日本物理学会の論文
1967-06-05