加工深さのインプロセス測定と制御によるレーザ三次元形状加工

概要

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This paper proposes a 3-D Iaser processing system with in-process monitoring and feedback control of the processing depth, which enables us to process an intended shape with accuracy. While in the conventional methods the processing depth is estimated by the predetermined relation to the prccessing conditions and determined on post-processed measurement, in the proposed system the processing depth is obtained in real time from the propagation time of AE (acoustic emission) signal caused by laser processing. The system consisted of a Q-switched Nd : YAG Iaser and an AE sensor attached on the back of the specimen is applied to process a shape with its depth changed stepwise by 150um to Imm for silicon nitride ceramic. The formerly developed laser processmg method usmg rotatmg beam named ", laser endmill" and AE signal detection synchronized with the beam rotation are employed, As a result, Iocal overprocessing is prevented and accuracy of form less than an error of 50um compared to the designed one is achieved.
公益社団法人精密工学会の論文
2001-02-05