移動パターン光源を用いた欠陥検出技術の開発

概要

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This paper proposes a method to detect small optical defects, which distort light rays. In the method, a moving cyclic pattern illumination is applied and images of an object are captured continuously under different phase condition of the pattern illumination. Maximum signal and minimum signal between these images for each pixel are calculated. A maximum image consisted of maximum signals for each pixel is an image of bright field gathered from captured images under pattern illumination of various phase conditions. By the same token, a minimum image is an image under dark field. A pattern illumination provides high sensitivity of detection independent of places and information from multiple images provides high performance of recognition for inspection. The simple algorithm is not affected by image distortions of a pattern illumination, so it provides means to inspect curvature surface. Various internal low contrast defects of curvature glasses are inspected by the method using transmitted illumination, the results demonstrates that defects which is smaller than pixel resolution can be detected.
公益社団法人精密工学会の論文
2001-11-05