高精度自由曲面形状測定装置の開発
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概要
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This paper describes a high-precision free-form measurement machine named "A-Ruler." It will be used to measure the shape of freely curved surfaces with a precision of 5 nmRMS at a measurement volume of 350 x 80 x 50 mm^3. A contact-type probe guided by a pair of parallel springs is employed for its capacity to easily measure oblique surfaces. The probe's five motion errors are measured and compensated for using six laser interferometers and three mirrors arranged perpendicularly to each other. This is the core structure of the device, and it ensures accuracy of measurement. On the other hand, other portions such as XYZ-slides are made with rather ordinary components. Studies on margin of error indicate that the measurement of a spherical surface is influenced by almost all types of errors. Therefore, the performance of A-Ruler can be assessed by measuring a spherical surface. A concave sphere work-piece made of Zerodur^<TM> was prepared for this purpose. Its curvature radius is 104.508 mm, the evaluation area is φ120 mm and the maximum angle of obliqueness is 35 degrees. The repeatability, or the difference between two consecutive measurements, is 3.8 nmRMS. The error of the probe's sphericity is found to be sufficiently small compared to this repeatability. Precision is assessed by comparison with an interferometer. The difference between A-Ruler and the interferometer is 3.5 nmRMS per φ120mm area.
- 公益社団法人精密工学会の論文
- 2001-10-05
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