リニヤスケール測定用干渉測長機の開発

概要

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This paper describes of development an inteferometer for measurement grating and index scales. The interferometer is provided with a photo-electric microscope to detect the edge of the scale grating.Measuring object is fixed on a double-moving table. An upper table is supported by the cross roll guide ways and driven by a laminating piezoo-actuator. An under table is supported by the pneumatic half-floating slideways, and driven by lead screw. In this article, the specification, system and specific constructions, heat insulating plan, calibration of laser wavelength, estimate of the errors, and performance are described. The interferometer has the following specifications : (1)Measuring range is 200mm, (2)Fringe counting resolution of primary development is 8nm, secondary one is 4nm, (3)Interferometric light is He-Ne laser, (4)Thermometer is platinum resistance thermometer.
公益社団法人精密工学会の論文
1992-09-05