表面形状検査測定用ホログラム干渉計 : ホログラムガラス基板の光学的不均一性を補償した光学系

概要

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A new type of holographic interferometer, called hologram interferometer, for testing and measuring optical surface configuration is proposed. The interferometer mainly consists of a laser source, a microscope objective and a collimating lens to get a collimated beam, a hologram which serves both as an objective lens and a half mirror in a Twyman-Green type interferometer and a fiat reference surface mirror. The optical inhomogeneity of hologram glass substrate is automatically compensated. Experimentally measured cofiguration error of a commercial spherical mirror whose diameter was 35 mm and radius of curvature was 200 mm were λ/10 in peak to valley andλ/50 in rms whereλwas 0.6328 μm. These values were the same as those obtained by using a commercial Fizeau type interferometer.
1990-04-05