リニアスケール用レーザ干渉刻線機

概要

論文の詳細を見る
Described in this paper is a ruling machine for linear scales that is controlled by a laser interferometer with simple and inexpensive electronic systems. A He-Ne two-mode laser is used as a light source of the interferometer, and the stabilization of the wavelength depends on the comparison of the light intensities of the operating longitudinal modes. Fringes produced by the interferometer are changed to a train of electric pulses that measure the displacement of the moving carriage of the interferometer with the unit of one tenth of the wavelength. The pulse train is, after passing through a gate, fed to an electronic counter which operates a flash lamp. At the gate, the periodic elimination of the pulses is done to cancel the accumulation of the errors of the pulse spaces. The interval of elimination is calculated by a computer using the measured values of atmospheric temperature and pressure, and scale blank temperature. The light from the flash lamp is thrown on a slit and the reduced image of the slit is focused on a photographic plate which is mounted on the moving carriage. The accuracy of linear scales of 200mm long made by this ruling machine is found to be better than ±0.3μm.
公益社団法人精密工学会の論文
1989-12-05