仕上面粗さの微細校正
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概要
- 論文の詳細を見る
- 公益社団法人精密工学会の論文
- 1985-09-05
著者
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Whitehouse D.j.
Microengineering Centre Engineering Department University Of Warwick
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BOWEN D.K.
Microengineering Centre, Engineering Department, University of Warwick
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CHETWYND D.G.
Microengineering Centre, Engineering Department,
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DAVIES S.T.
University of Warwick
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金沢 彰
東京都立大学工学部
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Bowen D.k.
Microengineering Centre Engineering Department University Of Warwick
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Chetwynd D.g.
Microengineering Centre Engineering Department