直進案内可動体の磁気浮上制御(第1報) : 可動体構造と制御法

概要

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Magnetic suspension mechanisms, such as linear guides and magnetic bearings, are particularly useful in vacuum and in very clean atmosphere, because they need no lubricant and are entirely free from dust caused by metallic contact. This paper describes minimum magnet carrier construction for small and light composition and control method of magnetic forces with interaction on each other. Five equations of motion in the directions to be restricted by magnetic forces and six electronic circuit equations are derived for the carrier which has six magnets and hung in a trapezoidal groove on the basis of the Lagrange-Maxwell equation. The multi input-output control method of the modern control theory is applied for the carrier control system the magnetic forces of which are strongly affected in each other. A computational example is shown wherein the bearing stiffnesses for two linear and for three angular motions can be individually made equal, which are not acquired in the individual control case. The fundamental equations and the suitability of magnet property linearization in terms of its gap and current are confirmed by experiments.
公益社団法人精密工学会の論文
1984-09-05