Measurement of near-UV irradiance taking into consideration reciprocity law failure for irradiated materials

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概要

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• A method of evaluating effective irradiance is discussed for photoresist with the reciprocity law failure property irradiated by fluctuating radiation. The resultant formula for evaluating effective irradiance suggests that both reciprocity law failure and time response for the photochemical reaction should be considered when evaluating effective irradiance.This method is used in an irradiance meter which measures the distribution of near ultraviolet effective irradiance. This irradiance meter is applied to the photoresist exposure process in color TV picture tube fabrication. This meter automatically measures relative irradiance over 51 points on the phosphor screen of a color TV picture tube, in about 1 min. Reproducibility and accuracy for measured values are estimated to be about 0.2% and 1%, respectively. Absolute irradiance is measured at the center of the screen, with an accuracy of about 3%.

• 社団法人照明学会の論文

著者

• Nishizawa Masahiro

  Electron Tube Division Hitachi Ltd.

• Kinameri Kanji

  Central Research Laboratory Hitachi Ltd.

• Yokomizo Hiroshi

  Electron Tube Division Hitachi Ltd.

• NONAKA Mamoru

  Central Research Laboratory, Hitachi, Ltd.,

• Nonaka Mamoru

  Central Research Laboratory Hitachi Ltd.

関連論文

• Determination of Surface Charge and Interface Trap Densities in Naturally Oxidized n-Type Si wafers Using ae Surface Photovoltages
• Measurement of near-UV irradiance taking into consideration reciprocity law failure for irradiated materials
• The Monte Carlo method in the predetermination of a luminous intensity distribution
• Photometric error due to non-uniform responsivity in a photometer aperture

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