Experimental Study of Heating Mechanism in Low-pressure Microwave Plasmas
スポンサーリンク
概要
著者
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Kudela Jozef
Satellite Venture Business Laboratory Shizuoka University
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Kando Masashi
Graduate School Of Electronic Science And Technology Shizuoka University
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TEREBESSY Tibor
Graduate School of Electronic Science and Technology, Shizuoka University
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Terebessy Tibor
Graduate School Of Electronic Science And Technology Shizuoka University
関連論文
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- High-Speed Camera Study of the Surface Wave Discharge Propagation in Xenon
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- Low-Pressure High-Density Plasma Production for Chemical Vapor Deposition using Directly Heated Cathode Made of Thoriated Tungsten Wire
- The influence of a dielectric wall in a discharge chamber on the propagation of microwave surface-waves
- Investigation of Quartz Side Wall Influence on Radial Plasma Density Profiles in Low-Pressure Surface Wave Plasma Source
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