<研究速報>Autonomous decentralized systems based on ditributed conrolled MEMS actuator for micro conveyance application
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概要
著者
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Yoshio Mita
Department Of Electric Engineering The University Of Tokyo
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Yamato Fukuta
Department Of Electric Engineering The University Of Tokyo
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Yves-Andre Chapuis
Institute of Industrial Science, University of Tokyo
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Yves-andre Chapuis
Institute Of Industrial Science University Of Tokyo
関連論文
- Nano-structures fabrication technique for biological applications
- Autonomous decentralized systems based on ditributed conrolled MEMS actuator for micro conveyance application