<研究報告>ダイヤモンドCVD合成におけるsp^3混成軌道とsp^2混成軌道を有する炭素源の効果

概要

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We have successfully synthesized the particles and thin films of diamond using benzene and cyclohexane as a carbon compound by the chemical vapor deposition (CVD) method. Cyclohexane, in which all the valence electrons of six carbon atoms occupy only sp^3 hybridized orbitals, produced diamond particles of 9.7±1.4μm in diameter in 30 minutes and thin film of 13.4±0.7μm thick in 90 minutes. On the other hand benzene, in which all the valence electrons of six carbon atoms have only sp^2 hybridized orbitals, produced diamond particles of 4.7±0.7μm in diameter in 30 minutes and the thin film of 14.9±0.4μm thick in 120 minutes. On the basis of thermodynamic data, it is shown that the rate determining step of CVD diamond synthesis never exist in the reaction path breaking down the above cyclic compounds in the gaseous phase. An effective reaction route of CVD diamond synthesis is suggested from the viewpoint taht the chair conformer of cyclohexane can produce easily the cubic one which is formed by stacking the carbon skeleton of just the same conformer as that of cyclohexane on (111) plane of cubic lattice.
沼津工業高等専門学校の論文
2003-01-31