E-H Mode Transition on an Inductively Coupled RF Discharge
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概要
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キーワード : inductively coupled RF discharge E-H mode transition discharge hysteresis matching capacitance equivalent circuit model 抄録 : An inductively coupled RF discharge has been analyzed by an equivalent circuit model including both inductive and capacitive coupling branches to clarify a mechanism of the E-H mode transition. A pure inductive discharge is considered to be a co-axial one-turn secondary winding of an air-core transformer, while a capacitive discharge is assumed to be generated by a collisionless stochastic sheath heating. In this model we take into account circuit parameters of a matching network, including an antenna coil. The effect of the circuit parameters as well as plasma impedance on the E-H mode transition is investigated. The E-H mode transition is classified according to the relative relation on the circuit parameters and plasma impedance. It was found that a matching capacitance plays an important role in a hysteresis phenomenon on the E-H mode transition
- 鶴岡工業高等専門学校の論文
- 2002-12-20