Townsend 法を用いたPulse スオームパラメータ計測の留意点

概要

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Plasma treatment or gas discharge treatment of semiconductor, metal, plastic and gas itself are widely applied for the improvement of surface properties of materials, production of new material and engineering in the field of environmental protection. For further applications of these techniques we need fundamental knowledge on the plasma or discharge themselves. For example, what state of gas plays main role to keep plasma or discharge, is it the gas of ground state molecule, or excited state molecule or radical molecule produced by dissociation of molecule. And if they are contained in some amount of molecule in gas, what effect will be observed in plasma or gas discharge. In this paper we introduce the powerful method measuring the swarm properties of these gases, called The Pulse Townsend method.
大同工業大学の論文