Density Jump and Antenna Resistance in a High Pressure Helicon PlasmaSource

概要

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Antenna loading and density jump experimentally obtained by double $m=0$ antenna at high argon pressures of 51 and 6 mTorr are compared with the theory, which considers the conservation of helicon waves into electrostatic waves. The abrupt density jumps are found to depend strongly on the antenna spectrum. In a wide range of operation parameters, computed plasma load resistance, thresholds for density jumps and magnetic field profiles satisfactorily agree with experimental data.
九州大学の論文
2000-06-30