Thermo-Electro-Mechanical Analysis of a Piezoelectric Film Used in Micro-Electro-Mechanical Systems (MEMS)
スポンサーリンク
概要
著者
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Shioya Tadashi
Department of Aeronautics and Astronautics, University of Tokyo
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He W‐j
Univ. Tokyo Tokyo Jpn
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Shioya Tadashi
Department Of Aeronautics And Astronautics
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HE Wen-Jun
Post-Doctoral Fellow at Department of Aeronautics and Astronautics, Univ.of Tokyo from Zhejiang Univ
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