Discussion on Barrier Discharge by Applying Circuit Theory

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概要

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• The dielectric barrier discharge is the useful one as the plasma processing for the decomposition of TOx gas. This paper describes on the equivalent circuit for dielectric barrier discharge. Because we need to know how condition is the most effective on the plasma processing by employing barrier discharge. The author employed 3-Voltmeters Method and measured the phase difference between voltage and current, the power consumed by barrier discharge and the reactance of barrier discharge. From these measurements, the author has clarified that the equivalent circuit of barrier discharge is the series connection of the resistance and the capacitance. And the author has also reported the condition of the maximum power consumed in discharge.

• 長崎大学の論文
• 2002-03-27

著者

• Itoyama K

  Department Of Technology Education Faculty Of Education Nagasaki University

• ITOYAMA Kagehiro

  Department of Technology Education, Faculty of Education, Nagasaki University

関連論文

• Discussion on Barrier Discharge by Applying Circuit Theory

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