二枚の平行板陰極を有するアルゴン直流グロー放電のモード転移機構
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We have examined the mechanism of the mode transition in the argon dc glow discharges with two plane-parallel cathodes. We have found three modes (mode-I, II and III) in current-voltage characteristics and luminescence patterns. The features of the modes were as follows ; The mode-1 : The discharge current was low and weak luminescence was found in the middle between the cathodes. The luminescence consisted of several glows, which have united as the discharge current increased ; The mode-II : The luminescence separated into two glows to the cathode sides and the widths of the cathode dark space decreased as the current increased. The widths of the glows extended and finally they coalesced ; The mode-III : With further increment of the current the luminosity of the glow increased, and then the features of the discharges showed those of the hollow cathode discharge. Using the cathode fall model proposed by Fujii et. al.(IEEE J. Quantum Electronics, QE-15,35 (1979)), we have attempted the quantitative evaluation to the ratio of the secondary electron current yielded by photons and metastable atoms from the cathode to the discharge current, and that for ion current. In the mode-I, the discharge current almost consisted of the ion current created in the cathode fall region. In the mode-II, the ratio of the secondary electron current to the discharge current was 50% to 80%. In the mode-III (hollow cathode discharge), the ratio exceeded 80%. We have inferred that the transition from the mode-I to II was caused by the shift of the sustaining mechanism of the glow discharges and no essential difference between the mode-II and III existed.
- 前橋工科大学の論文
- 2002-03-25
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