Energy Dispersion of Positive Ions Effused from an RF Plasma

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概要

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• The energy dispersion for study of the sheath formation and the ion extraction in an RF plasma are measured by extracting the positive ions through a small hole in a metal plane probe and subjecting them to an electrostatic energy analyzer and a quadrupole mass filter. The energy dispersion of positive ions effused from an RF plasma, ΔE, under the assumption that the ion velocity is modulated by a time variation of plasma potential, is theoretically given by ΔE ∝ 1/ω (m/e)^<-1/2>V, where ω is the RF exciting angular frequency, m/e is the specific ion mass and V is the maximum amplitude of the time varying component of the plasma potential, respectively. The theoretical results agree well with the experimental ones.

• 核融合科学研究所の論文

著者

• Okamoto Yukio

  Research Information Center Institute Of Plasma Physics Nagoya University:central Laboratory Hitachi

• Tamagawa Hajime

  Research Information Center Institute Of Plasma Physics Nagoya University:permanently At Department

• Okamoto Yukio

  Research Information Center Institute Of Plasma Physics Nagoya University:permanently At Department

関連論文

• Production of a Synthesized Plasma
• Production of a Synthesized Plasma
• Energy Dispersion of Positive Ions Effused from an RF Plasma

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