Thermal Optical Path Difference Analysis of Off-Axis Lens Ray Trace Foot-Print
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概要
- 論文の詳細を見る
- 2013-04-01
著者
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HSU Ming-Ying
Instrument Technology Research Center, National Applied Research Laboratories
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CHANG Han-Chao
Instrument Technology Research Center, National Applied Research Laboratories
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CHANG Shenq-Tsong
Instrument Technology Research Center, National Applied Research Laboratories
関連論文
- The Development of a Portable Line-Shaping Optical System for Silicon Surface Treatment
- Thermal Optical Path Difference Analysis of Off-Axis Lens Ray Trace Foot-Print