Evaluation of Friction Properties of Amorphous SiC Film in Dry Air and Ar Environments at Reduced Pressures
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概要
- 論文の詳細を見る
- 2012-09-28
著者
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SUGETA Atsushi
Maj. Mech. Sys. Eng., Hiroshima University
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AKEBONO Hiroyuki
Maj. Mech. Sys. Eng., Hiroshima University
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KATO Masahiko
Maj. Mech. Sys. Eng., Hiroshima University
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KUROSE Kohei
Hiroshima University