帯電金属球電極の移動速度が静電気放電に及ぼす影響

概要

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In this study, I experimentally clarified the nature of the characteristics of the electrostatic discharge (ESD) that occurs when a charged object moves toward a stationary grounded object. The spark lengths, discharge currents, and induced voltages in a magnetic probe were measured when a charged metallic spherical electrode connected to a 422 pF capacitor approached a stationary grounded object, which was the current target, for different moving speeds of the charged metallic spherical electrode in the range of 1-100 mm/s. The charge voltages of the capacitor were +6.5 kV and +10 kV. According to the result, the average gap length shortened with the moving speed of the spherical electrode. The average peak values of the discharge current and the induced voltage were likely to increase with the moving speed of the spherical electrode. The average rise times of the discharge current and the induced voltage were likely to reduce with the moving speed of the spherical electrode. The relation between the spark length and the discharge current due to ESD can be explained qualitatively by using an equation derived from the spark resistance formula proposed by Rompe and Weizel.
2012-09-01