Titanium Film Deposition by High-Power Impulse Magnetron Sputtering : Influence of Pulse Duration
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概要
- 論文の詳細を見る
- 2011-12-15
著者
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SUN H.
Key Laboratory of Automobile Materials of Ministry of Education as well as Department of Materials Science & Engineering, Jilin University
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Yin T.
Key Lab. Of Advanced Materials Technology Ministry Of Education Southwest Jiaotong University
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Jing F.
Key Lab. Of Advanced Materials Technology Ministry Of Education Southwest Jiaotong University
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Yukimura K.
Key Lab. Of Advanced Materials Technology Ministry Of Education Southwest Jiaotong University
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LENG Y.
Key Lab. of Advanced Materials Technology, Ministry of Education, Southwest Jiaotong University
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HUANG N.
Key Lab. of Advanced Materials Technology, Ministry of Education, Southwest Jiaotong University
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Leng Y.
Key Lab. Of Advanced Materials Technology Ministry Of Education Southwest Jiaotong University
関連論文
- Biomedical applications of plasma and ion beam processing
- Fabrication of in Situ TiSi (Ti_5Si_3, TiSi)/TiC Local Reinforced Steel Matrix Composite via Combustion Synthesis
- Titanium Film Deposition by High-Power Impulse Magnetron Sputtering : Influence of Pulse Duration
- Titanium Film Deposition by High-Power Impulse Magnetron Sputtering : Influence of Pulse Duration