Design evaluation of a single-axis precision controlled positioning stage

スポンサーリンク

概要

論文の詳細を見る
2009-10-01

著者

Smith Stuart
Center For Precision Metrology University Of North Carolina At Charlotte
BUICE Eric
Center for Precision Metrology, University of North Carolina at Charlotte
OTTEN David
Precision Motion Control Laboratory, Massachusetts Institute of Technology
YANG Raymond
Center for Precision Metrology, University of North Carolina at Charlotte
HOCKEN Robert
Center for Precision Metrology, University of North Carolina at Charlotte
TRUMPER David
Precision Motion Control Laboratory, Massachusetts Institute of Technology
Yang Raymond
Center For Precision Metrology University Of North Carolina At Charlotte
Otten David
Precision Motion Control Laboratory Massachusetts Institute Of Technology
Hocken Robert
Center For Precision Metrology University Of North Carolina At Charlotte
Trumper David
Precision Motion Control Laboratory Massachusetts Institute Of Technology
Buice Eric
Center For Precision Metrology University Of North Carolina At Charlotte

関連論文

スポンサーリンク