Atomic force microscope for accurate dimensional metrology
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概要
- 論文の詳細を見る
- 2009-04-01
著者
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Stein A.
Massachusetts Institute Of Technology Department Of Mechanical Engineering
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MAZZEO A.
Massachusetts Institute of Technology, Department of Mechanical Engineering
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TRUMPER D.
Massachusetts Institute of Technology, Department of Mechanical Engineering
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HOCKEN R.
University of North Carolina-Charlotte, Department of Mechanical Engineering and Engineering Science
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Hocken R.
University Of North Carolina-charlotte Department Of Mechanical Engineering And Engineering Science
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Trumper D.
Massachusetts Institute Of Technology Department Of Mechanical Engineering
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Mazzeo A.
Massachusetts Institute Of Technology Department Of Mechanical Engineering