Enlarging Lens Design with F-θ Lens for Real Time Laser Lithography Inspections
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概要
- 論文の詳細を見る
- 2011-02-01
著者
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Lin Yu-chung
Laser Application Technology Center Itri South Industrial Technology Research Institute
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Lee Min-kai
Laser Application Technology Center Itri South Industrial Technology Research Institute
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HUANG Kuang-Lung
Department of Electro-Optical and Energy Engineering, Ming Dao University
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CHU Mei
Department of Electro-Optical and Energy Engineering, Ming Dao University
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CHEN Cheng-Huan
Department of Power Mechanical Engineering, National Tsing Hua University
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LIU Sung-Ho
Laser Application Technology Center, ITRI South, Industrial Technology Research Institute
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Chu Mei
Department Of Electro-optical And Energy Engineering Ming Dao University
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Liu Sung-ho
Laser Application Technology Center Itri South Industrial Technology Research Institute
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Chen Cheng-huan
Department Of Power Mechanical Engineering National Tsing Hua University
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Huang Kuang-lung
Department Of Electro-optical And Energy Engineering Ming Dao University
関連論文
- Off-Axis Astigmatic Reflector for Compact Optical Pickup
- Enlarging Lens Design with F-θ Lens for Real Time Laser Lithography Inspections
- Development of a Double-Sided Micro Lens Array for Micro Laser Projector Application