High-Speed and Wide-Angle Deflection Optical MEMS Scanner Using Piezoelectric Actuation
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概要
- 論文の詳細を見る
- 2010-05-01
著者
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Sugawara Takashi
Technology Development Division Victor Company Of Japan Ltd.
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Okumura Mikio
Technology Development Division Victor Company Of Japan Ltd.
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ISEKI Takayuki
Technology Development Division, Victor Company of Japan, Ltd. (JVC)
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Iseki Takayuki
Technology Development Division Victor Company Of Japan Ltd.
関連論文
- Two-Dimensionally Self-Holding Deflection Mirror Using Surface Acoustic Wave Motor
- Two-Dimensionally Deflecting Mirror Using Electromagnetic Actuation
- High-Speed and Wide-Angle Deflection Optical MEMS Scanner Using Piezoelectric Actuation