Indirectly Reactive Sputtering Coater for High Quality Optical Coatings

概要

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An indirectly reactive sputtering coater has been developed to deposit various high quality metallic and metal oxide films at high deposition rate. In this letter, several kinds of filters such as antirefiection (AR) coating, IR-cut filter, and Rugate filter were deposited for the benchmark test of implemental capabilities. Our coater was established to be a powerful tool for both discrete multilayer and Rugate filters due to high stability and reproducibility of the refractive index and the deposition rate.
（社）電子情報通信学会の論文
2008-10-01