Conjugated Silicon-Based Polymer Resists for Nanotechnologies : EB and UV Meditated Degradation Processes in Polysilanes
スポンサーリンク
概要
- 論文の詳細を見る
- Japan Institute of Metalsの論文
- 2010-02-01
著者
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Schauer Petr
Institute Of Scientific Instruments Academy Of Sciences Of The Czech Republic
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Schauer Frantisek
Polymer Centre Tomas Bata University In Zlin Faculty Of Technology
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KURITKA Ivo
Polymer Centre, Tomas Bata University in Zlin, Faculty of Technology
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BAO Hua
Key Laboratory for Ultrafine Materials of Ministry of Education, School of Material Science and Engi
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Bao Hua
Key Laboratory For Ultrafine Materials Of Ministry Of Education School Of Material Science And Engin
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Kuritka Ivo
Polymer Centre Tomas Bata University In Zlin Faculty Of Technology