Pressure Sensing by Electrical Admittance Measurement of A Comb-drive Actuator

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概要

• 論文の詳細を見る
• 2007-05-01

著者

• Hashiguchim Gen

  Faculty Of Engineering Kagawa University

• AYANOS Kenjiro

  Faculty of Engineering, Kagawa University

• Ayanos Kenjiro

  Faculty Of Engineering Kagawa University

関連論文

• Pressure Sensing by Electrical Admittance Measurement of A Comb-drive Actuator

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