Novel Fabrication method for Long Silicon Microneedles with Three-Dimensional Sharp Tips and Complicated Shank Shapes by Isotropic Dry Etching

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概要

• 論文の詳細を見る
• 2007-05-01

著者

• Aoyagi Seiji

  Systems Management Engineering Kansai University

• Izumi Hayato

  Systems Management Engineering Kansai University

関連論文

• Novel Fabrication method for Long Silicon Microneedles with Three-Dimensional Sharp Tips and Complicated Shank Shapes by Isotropic Dry Etching

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