Advanced Silicon Microstructures, Sensors, and Systems
スポンサーリンク
概要
- 論文の詳細を見る
- 2007-05-01
著者
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RUTHER Patrick
Microsystem Materials Laboratory, Department of Microsystems Engineering (IMTEK), University of Frei
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PAUL Oliver
Microsystem Materials Laboratory, Department of Microsystems Engineering (IMTEK), University of Frei
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Paul Oliver
Microsystem Materials Laboratory Department Of Microsystems Engineering (imtek) University Of Freibu
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Ruther Patrick
Microsystem Materials Laboratory Department Of Microsystems Engineering (imtek) University Of Freibu
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Gaspar Joao
Microsystem Materials Laboratory Department Of Microsystems Engineering (imtek) University Of Freibu
関連論文
- Recent Progress in Neural Probes Using Silicon MEMS Technology
- Advanced Silicon Microstructures, Sensors, and Systems