Evaluation of Intrinsic Shear Piezoelectric Coefficient d_<15> of c-Axis Oriented Pb(Zr,Ti)O_3 Films
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概要
- 論文の詳細を見る
- 2009-09-25
著者
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Kanno Isaku
Micro Engineering Kyoto University
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Kotera Hidetoshi
Micro Engineering Kyoto University
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Wasa Kiyotaka
Micro Engineering Kyoto University
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Akama Kenji
Micro Engineering, Kyoto University, Yoshida-honmachi, Sakyo-ku, Kyoto 606-8501, Japan
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Akama Kenji
Micro Engineering Kyoto University