Optical and Mechanical Properties of AlF_3 Films Produced by Pulse Magnetron Sputtering of Al Targets with CF_4/O_2 Gas
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概要
- 論文の詳細を見る
- 2009-08-01
著者
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Liu Ming-chung
Thin Film Technology Center/department Of Optics And Photonics National Central University
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Liu Ming-chung
Thin Film And Technology Center National Central University
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Lee Cheng-chung
Department Of Optics And Photonics/thin Film Technology Center National Central University
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Liao Bo-huei
Thin Film Technology Center/department Of Optics And Photonics National Central University
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JAING Cheng-Chung
Department of Optoelectronic System Engineering, Minghsin University of Science and Technology
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LEE Cheng-Chung
Thin Film Technology Center and Institute of Optical Science, National Central University
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Jaing Cheng‐chung
Minghsin Univ. Sci. And Technol. Hsinchu Twn
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- Optical and Mechanical Properties of AlF_3 Films Produced by Pulse Magnetron Sputtering of Al Targets with CF_4/O_2 Gas
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