Deposition of Silicon Oxynitride Films by Ion Beam Sputtering at Room Temperature
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概要
- 論文の詳細を見る
- 2009-04-01
著者
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Chen Huang-lu
Graduate Institute Of Applied Science And Engineering Fu-jen Catholic University
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Hsu Jin-cherng
Department Of Physics Fu-jen Catholic University
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Chen Huang-lu
Graduate Institute Of Applied Science And Engineering Fu Jen Catholic University
-
Hsu Jin-cherng
Department Of Physics Fu Jen Catholic University
関連論文
- Deposition of Silicon Oxynitride Films by Ion Beam Sputtering at Room Temperature
- Optical Properties of High Transmittance Aluminum Oxynitride Thin Films for Spectral Range from Near Ultraviolet to Visible
- Anti-reflective Effect of Transparent Polymer by Plasma Treatment with End-Hall Ion Source and Optical Coating
- Aluminium Oxide Optical Film Fabricated with Ion-Assisted Deposition Using Sulphur Hexafluoride and Oxygen Working Gases