Etching Effect of the Autocloning Structure Using Ion-Assisted Deposition
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概要
- 論文の詳細を見る
- 2009-04-01
著者
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Chang Te-hung
Department Of Optics And Photonics National Central University
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Lee Cheng-chung
Department Of Optics And Photonics National Central University
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YEH Yu-Wen
Department of Optics and Photonics, National Central University
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CHEN Sheng-Hui
Department of Optics and Photonics, National Central University
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Yeh Yu-wen
Department Of Optics And Photonics National Central University
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Chen Sheng-hui
Department Of Electrical Engineering National Taiwan University Of Science And Technology
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Chen Sheng-hui
Department Of Optics And Photonics National Central University
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